APA Style

RAI-CHOUDHURY, P. Ed.. (1997). Handbook of microlitography, micromachining and microfabrication, v. 2 . Bellingham: SPIE Optical.

Chicago Style

RAI-CHOUDHURY, P. Ed.. Handbook of microlitography, micromachining and microfabrication, v. 2. Bellingham: SPIE Optical, 1997. Text.

MLA Style

RAI-CHOUDHURY, P. Ed.. Handbook of microlitography, micromachining and microfabrication, v. 2. Bellingham: SPIE Optical, 1997. Text.

Turabian Style

RAI-CHOUDHURY, P. Ed.. Handbook of microlitography, micromachining and microfabrication, v. 2. Bellingham: SPIE Optical, 1997. Print.