Text

Handbook of microlitography, micromachining and microfabrication, v. 2

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Microlithography, micromachining and microfabrication are rapidly finding applications in many areas, from sensors and actuators to biomedical devices, as well as their uses in microelectronics device manufacturing. Litography is the key Technology that has driven the dynamic growth..

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Availability

171115311

670 RAI h

Z. HANDIMAN

Available

Detail Information

Series Title

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Call Number

670 RAI h

Publisher

Bellingham : SPIE Optical., 1997

Collation

viii, 692p.; 26 cm.

Language

English

ISBN/ISSN

0-81942379-3

Classification

670

Content Type

-

Media Type

-

Carrier Type

-

Edition

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Subject(s)

MICROLITHOGRAPHY

Specific Detail Info

c

Statement of Responsibility

-

Other version/related

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