Handbook of microlitography, micromachining and microfabrication, v. 2
Microlithography, micromachining and microfabrication are rapidly finding applications in many areas, from sensors and actuators to biomedical devices, as well as their uses in microelectronics dev…
- Edition
- -
- ISBN/ISSN
- 0-81942379-3
- Collation
- viii, 692p.; 26 cm.
- Series Title
- -
- Call Number
- 670 RAI h
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